Unplug the MAF, start the car, if it idles fine....it's the MAF, order a new one....or you could spend time messing around spraying that MAF cleaner in it, finding the pin outs, shorting out your ECU and such and then.....order a new MAF.
Call Patrick at BMA tomorrow, I'm sure he could have one at the lowest possible price to you in just a day or so. Get ready, they are rather pricy. Mine went out just before our annual trip to the E34 Summer Meet in Chicago, Patrick had one on my doorstep the day before I left. 10 minutes to plug it in and everything was back to normal.
Good Luck,
JR
JR